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MEMS thermal actuator : ウィキペディア英語版 | MEMS thermal actuator A MEMS thermal actuator is a micromechanical device that typically generates motion by thermal expansion amplification. A small amount of thermal expansion of one part of the device translates to a large amount of deflection of the overall device. Usually fabricated out of doped Single Crystal Silicon or Polysilicon as a complex compliant member, the increase in temperature can be achieved internally by electrical resistive heating or externally by a heat source capable of locally introducing heat. Microfabricated thermal actuators can be integrated into micromotors. == Types of thermal actuators ==
*Asymmetric (bimorph) *Symmetric (bent beam, chevron)
抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)』 ■ウィキペディアで「MEMS thermal actuator」の詳細全文を読む
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